描述

The mass flow controller (MFC) type 8626 is suited for regulating the mass flow of high gas flows. The thermal inline sensor is located directly in the gas stream and therefore reaches very fast response times. A direct-acting proportional valve from Bürkert guarantees a high sensitivity. The integrated PI controller ensures outstanding control characteristics of the MFC. Type 8626 can optionally be calibrated for two different gases; the user can switch between these two gases. As electrical in

技术信息: